Bimorph cylindrical piezoceramic scanner for scanning probe nanomicroscopes

Authors

  • V. Sharapov
  • A. Vladišauskas
  • S. Filimonov

Keywords:

nanotechnology, scanning probe microscopy, piezoceramic scanner

Abstract

The article is devoted to the problems of piezoscanners. The analysis of existent domestic and foreign constructions of piezoscanners is carried out. It is certain that existent constructions have a lot of shortcomings, basic from which – an insufficient range of scanning. A novel construction of the piezoscanner is developed on the basis of a bimorph cylindrical element. The standard of developed piezoscanner is made and the results of experimental researches, in which the mutual influence between actuators on XYZ the co-ordinates is reduced.

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Published

2009-12-10

Issue

Vol. 64 No. 4 (2009)

Section

ULTRASONIC TRANSDUCERS

License

Copyright terms are indicated in the Republic of Lithuania Law on Copyright and Related Rights; Articles 4-37.
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